Note that SATW detector windows are AP* ultrathin polymer windows manufactured by Moxtek and are almost supplied by all EDS detector companies. Therefore, it is the strong absorption of the background (continuum) X-rays that produces the artefact peak. The EDS windows are normally SATW windows and their material has a specific transmission profile with a strong absorption edge just above but very close to the C X-ray energy, resulting in an artificial peak at the C energy position. This artefact is due to the window in the detector. Due to the high background counts in SEM-EDS, an artificial carbon (C) peak is always visible and thus a value of more than 2% carbon is normally measured even though there is no carbon in the specimen. The background counts in TEM-EDS are much lower than those in SEM-EDS spectrum. Practical Electron Microscopy and Database.
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